Plasma Etch and Strip in Microthechnology (PESM 2019). Book of abstracts. May 20–21, 2019, Grenoble, Franceсборник
Статьи, опубликованные в сборнике
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2019
Dry cleaning of transition-metal dichalcogenides using reducing downstream plasma
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Marinov D.,
de Marneffe J.F.,
Zhang J.,
With P.,
Smets Q.,
Arutchelvan G.,
Voronina E.,
Mankelevich Yu,
Rakhimova T.,
et al.
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в сборнике Plasma Etch and Strip in Microthechnology (PESM 2019). Book of abstracts. May 20–21, 2019, Grenoble, France, место издания MINATEC Grenoble, France, тезисы, с. 100-101
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2019
Pore sealing in low-k dielectrics by low-energy ions
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Voronina E.N.,
Lopaev D.V.,
Mankelevich Yu A.,
Rakhimova T.V.,
Sycheva A.A.
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в сборнике Plasma Etch and Strip in Microthechnology (PESM 2019). Book of abstracts. May 20–21, 2019, Grenoble, France, место издания MINATEC Grenoble, France, тезисы, с. 52-53