37th International Conference on Micro and Nano Engineeringсборник

Статьи, опубликованные в сборнике

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• • 2011 Electron-beam diagnostics microtomography and spectroscopy of microelectronics device structures
  • Orlikovsky N.A., Rau E.I., Tatarintsev A.A.
  • в сборнике 37th International Conference on Micro and Nano Engineering, тезисы, с. 77