33rd European Mask and Lithography Conferenceсборник

Статьи, опубликованные в сборнике

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• • 2017 Experimental verification of sub-wavelength holographic lithography physical concept for single exposure fabrication of complex structures on planar and nonplanar surfaces
  • Chernik Vitaly, Rakhovski\cyrchar\cyrii Vadim, Borisov Michael, Chelyubeev Dmitry, Miheev Peter, Shamaev Alexei
  • в сборнике 33rd European Mask and Lithography Conference, место издания SPIE, том 10446 DOI