Spatial Distribution and Kinetics of Negative Ions in Glow DC Discharge in Pure O2 and H2

Авторы: Ivanov V.V., Klopovskiy K.S., Lopaev D.V., Rakhimov A.T., Rakhimova T.V.
Сборник: Advanced Technologies Based on Wave and Beam Generated Plasma. NATO Science Series. Subseries 3: High Technology. Ed. by H.Schluter and A.Shivarova
Серия: 3. High Technology
Том: 67
Год издания: 1999
Место издания: Springer Netherlands
Первая страница: 495
Последняя страница: 496
DOI: 10.1007/978-94-017-0633-9_33
Аннотация: In order to understand and insight into physics of electronegative gas plasma we started a comprehensive experimental and theoretical study of the discharge in the gases with substantially different extent of electronegativity: H2, O2 and CF4. For this aim we have used a classical object of discharge physics glow DC discharge in cylindrical geometry. We have carried out the experiments directed to investigate non-locality and anisotropy effects on EEDF, as well as to study negative ion kinetics, metastable particles and atom and radical kinetics. Those investigations gave us the basis for developing the self-consistent approaches to electronegative gas discharge treatment and allowed one to study some elementary processes in details. Here there are presented one of the investigations — a study of spatial distribution and kinetics of negative ions in DC discharge in pure H2 and O2.
Добавил в систему: Лопаев Дмитрий Викторович

	ИСТИНА	Войти в систему Регистрация
	ИПМех РАН
	Главная Поиск Статистика О проекте Помощь

ИСТИНА