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Plasma density determination from ion current to cylindrical Langmuir probe with validation on hairpin probe measurementsстатья
Статья опубликована в высокорейтинговом журнале
Статья опубликована в журнале из списка Web of Science и/или Scopus- Авторы: Voloshin D., Rakhimova T.V., Kropotkin A., Amirov I.I., Izyumov Mikhail, Lopaev Dmitry, Zotovich Alexey, Zyryanov S.M.
- Журнал: Plasma Sources Science and Technology
- Том: 32
- Номер: 4
- Год издания: 2023
- Издательство: IOP Publishing
- Местоположение издательства: [Bristol, UK], England
- Номер статьи: 044001
- DOI: 10.1088/1361-6595/acc355
- Аннотация: Numerical and analytical approaches to plasma density determination from the ion current tocylindrical Langmuir probe are validated on hairpin probe measurements. An argon inductivelycoupled plasma discharge in a pressure range from 4.5 mTorr to 27 mTorr is studied. Thedischarge input power is varied in the range from 200 to 800 W, giving a plasma density in therange from 10^9 to 10^11 cm^{−3}. The approaches used for plasma density determination areanalytical collisionless orbital motion limit theory, fluid semianalytical model of ion radialmotion with ion collisions and particle-in-cell with a Monte Carlo collisions model of ioncurrent collection by the cylindrical Langmuir probe. The relative error of different models is shown. The ion collisions should be taken into account, even at relatively low pressures, in order to get a reliable plasma density value from the ion current to the Langmuir probe.
- Добавил в систему: Волошин Дмитрий Григорьевич