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Статьи в журналах
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- 2019 HIGH-RATE HIGH-DENSITY ICP ETCHING OF GERMANIUM
- Lagov P.B., Maslovsky V.M., Pavlov Yu S., Rogovsky E.S., Drenin A.S., Bondariev V.A.
- в журнале High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes, издательство Begell House Inc. (Danbury, United States), том 23, № 1, с. 57-70 DOI